Mipox Wafer Edge Polishing Equipment
Mipox WaferEdgePolisher boasts a track record of over 200 units delivered, primarily to SI wafer manufacturers and reclaimed wafer manufacturers.
Benefits of Tape Edge Polisher - Minimal damage to the wafer - Removal of films (e.g., SiO2) on the wafer edge is possible - Chemical-free processing - Easy utility connection - Capable of shaping various edge geometries - Both rough grinding and fine polishing are possible - Top edge polishing is possible - Can polish difficult materials such as SiC and GaN - Compatible with notches and orifices
- Company：兼松ＰＷＳ
- Price：Other
